RAS Chemistry & Material ScienceКоординационная химия Russian Journal of Coordination Chemistry

  • ISSN (Print) 0132-344X
  • ISSN (Online) 3034-5499

Trimethylplatinum(IV) Complexes for MOCVD Applications: A Physicochemical Study

PII
10.31857/S0132344X22600679-1
DOI
10.31857/S0132344X22600679
Publication type
Status
Published
Authors
Volume/ Edition
Volume 49 / Issue number 8
Pages
493-503
Abstract
The structure of trimethylplatinum(IV) iodide [(CH3)3PtI]4 (I) (CIF file CCDC no. 22330007) is refined. The structure of the synthesized for the first time trimethylplatinum(IV) complex with tridentate N,N,O-iminoketonate [(CH3)3Pt(C9H17N2O)] (II) is determined by X-ray diffraction (XRD) (CIF file CCDC no. 22330008). The purity of the isolated phases is confirmed by elemental analysis and IR and NMR spectroscopy. The thermal behavior of complex II is studied by thermogravimetry. The energies of ionization and fragmentation of the molecules of complex II leading to the formation of the most stable fragment [(CH3)3Pt]+ are estimated by quantum-chemical calculations. Complex II is tested in the MOCVD processes. The Pt films with the pronounced (111) texture and particle sizes about 100 nm are prepared on Si plates in the presence of oxygen.
Keywords
комплексы триметилплатины(IV) РСА термогравиметрия DFT MOCVD
Date of publication
01.08.2023
Year of publication
2023
Number of purchasers
0
Views
13

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